SMIF LPT Versaport LPI INdexer

Product Details

Wafer Size: 200mm
Cassette Pickup Position: 909mm (35.8 in)
Cassette Positioning: To within ±0.005 in (vertical) SMIF-Pod
Load Height: 900mm (35.5 in)
Rated Maximum Load Arm Reach: (measured from front of LPT to H-bar of SMIF-Pod) 307mm (12.10 in)
Reverse Cassette Orientation Height: 1578mm (62.13 in) Width: 457mm (18.00 in) Depth: 478mm (18.81 in) Weight: (without SMIF-Pod, Cassette, Wafers) 170 lbs (77.27 kg)
Travel Speed ​​(Mini Ambient): 57.2 mm (2.25 in)
per second Mounting: Tool mounted. The LPT can be locked to a repeatable position on the process tool using a calibrated interface frame. Power: 3.5 amps (100-120VAC) 2 amps (230VAC) Laser Note: LPT is a Class I laser product when used with SMIF-Pod diode lasers; Wavelength = 670 nm Laser Power = <1mW (Class II) Communications: Serial RS-232C (SECS I / SECS II), RS-485 (optional), bidirectional parallel LAN
Transmission cycle <90s; repositioning accuracy is 0.127mm; cleanliness level is better than Class 1;
direction error <0.2mm
Mature and stable interlocking system
Wafer traceability identification system Smart label
integrated self-diagnosis and advanced diagnostic software for easy design and troubleshooting.